考虑边缘效应的静电驱动MEMS振子非线性振动定性研究
李佰洲1, 韩建鑫1, 2, 黄仪1, 崔良玉1, 2
Qualitative study on nonlinear vibration of electrostatically actuated MEMS oscillator considering fringing effects
LI Baizhou1, HAN Jianxin1, 2, HUANG Yi1, CUI Liangyu1, 2
振动与冲击
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2025, (1): 10
-19
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